With the rapid development of space laser communication and deep space exploration in recent years, ultrahigh precision adjustment and tracking of the beam have been considered significant in optical satellite communication, stellar interferometers exoplanet imaging system, space optical telescopes, and other space optics applications. Owing to their quick response, high-precision tracking, and high-bandwidth control to the beam adjustment, fast steering mirrors (FSMs) placed between the light source and the optical terminal have drawn research interest.

This work presents a novel structure design of a decoupled piezo-actuated FSM integrated with self-sensing unite. The tilt movement of the developed FSM is implemented by the elastic deformation of a ring-type flexible hinge. The flexible ring achieves high kinematic decoupling. Four rhombus amplified structures with embedded piezoelectric ceramics are used to promise the larger angular displacement output. The strain gages bonded to the side of the piezoelectric stack are used as sensing units for feedback. The FSM is built-in bridge self-balancing module to ensure high-precision feedback signal. Finite element model is established to check the strength of the FSM and its ability to withstand vibration and overload. The experimental results show that the angle travels for more than 9.5 mrad under 140 V voltage drive, for both axes, with a low coupling ratio of less than 0.1%, and the working bandwidth of the FSM arrives over 2 kHz. The parameters of the FSM can meet the needs of inter-satellite laser communication, stellar interferometers exoplanet imaging systems as well as some other aerospace applications.